| abstract |
PROBLEM TO BE SOLVED: To purify chlorosilanes by efficiently converting boron and / or phosphorus in crude chlorosilanes into high-boiling components without requiring problems such as blockage of pipes and corrosion, and special equipment. I will provide a. Distillation is performed after ethers are added to crude chlorosilanes containing boron and / or phosphorus. The ethers preferably have an alkyl group having 4 to 8 carbon atoms, and the ethers are preferably added in an equimolar amount or more with respect to boron and / or phosphorus. [Selection figure] None |