http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005063985-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-66 |
| filingDate | 2003-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ba85597af8bb7bc899acc0b5381413b |
| publicationDate | 2005-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005063985-A |
| titleOfInvention | Conveying apparatus and conveying method, exposure apparatus and exposing method, and device manufacturing method |
| abstract | A gas replacement apparatus, an exposure apparatus, and a device manufacturing method that can efficiently and stably replace a gas in a mask space in a short time. One end portion is provided around a pattern formation region on a mask substrate and at least two ventilation portions are formed, and the other end portion of the frame member is provided to protect the pattern formation region. And a mask holding member (111) for holding the mask (R), a mask (R), and a mask holding member (111). And the gas supply port (112) facing at least one of the two ventilation portions when the mask (R) is held on the mask holding member (111). [Selection] Figure 5 |
| priorityDate | 2003-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.