http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005060511-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 |
| filingDate | 2003-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c4c5e99c202a61cc2fb6ceba5836a40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfd14b42b1b225473af4de1a3b5fcfbc |
| publicationDate | 2005-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005060511-A |
| titleOfInvention | Manufacturing method of resin for photoresist and manufacturing method of resin composition for photoresist |
| abstract | PROBLEM TO BE SOLVED: To obtain a photoresist resin that is extremely soluble in a resist solvent. SOLUTION: A monomer mixture containing at least a monomer a containing a group partly eliminated by an acid and becoming alkali-soluble and a monomer b containing an alicyclic skeleton having a polar group, Polymerization is performed by a dropping polymerization method under reduced pressure and reflux conditions to obtain a photoresist resin containing at least a repeating unit corresponding to the monomer a and a repeating unit corresponding to the monomer b. The polymerization temperature is usually 50 to 150 ° C., and the pressure during the dropping is preferably about 10 to 600 mmHg (1.33 to 79.8 kPa). [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007332285-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006282686-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021002212-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114051507-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4540524-B2 |
| priorityDate | 2003-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 163.