| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00 |
| filingDate |
2003-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed17bcfde2f661dc05177221b7d72895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f6a4de12bfcc96c056dbc17bd079133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08d89c045b100451d79add20c919e59e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0166b8a186d67ef76851eaf78420046d |
| publicationDate |
2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005055790-A |
| titleOfInvention |
Wavelength tunable optical filter and manufacturing method thereof |
| abstract |
PROBLEM TO BE SOLVED: To obtain a wavelength tunable optical filter that can be driven at a low pressure in addition to adjustment of an electrostatic gap, etc. and a manufacturing method thereof. A space is displaced by moving a high reflection film in a direction perpendicular to a surface on which a high reflection film is formed, and the distance from light reflected between the high reflection film and the high reflection film is separated. In the wavelength tunable optical filter that transmits light of a predetermined wavelength based on the movable body 21a on which the highly reflective film 23 is formed and the hinge 21b for suspending the movable body 21a are formed with a thickness different from at least the movable body 21a. It comprises at least a movable part 2 integrally formed with a support body including a support part 21c that supports the movable body 21a. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010517064-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006264216-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4495711-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008105162-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013152489-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9372293-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9658446-B2 |
| priorityDate |
2003-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |