http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005044908-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
| filingDate | 2003-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00b43cfa7328712587b0a3ecec600c6e |
| publicationDate | 2005-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005044908-A |
| titleOfInvention | Substrate heat treatment support member |
| abstract | Provided is a substrate heat treatment support member that does not cause a slip on a semiconductor substrate or a film thickness unevenness on a substrate surface even when used in an epitaxial growth process, and does not cause dullness on the surface of a white epitaxial film. The substrate heat treatment support member is a substrate heat treatment support member in which a concavely curved substrate receiving portion for supporting a substrate to be heat treated is provided on a surface of a flat substrate in a circular shape. The measurement positions measured in eight directions from the center to the outer periphery at an equal interval of 45 ° have a semicircular arc shape with the center at the deepest part and the two or more continuous directions. The shape of the following measurement position is deeper than the semicircular arc shape at a position of 1/5 to 1/2 of the radius from the center. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017022320-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106876248-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106876248-A |
| priorityDate | 2003-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.