| abstract |
An optical encoder capable of stabilizing the intensity of a light beam and miniaturizing a sensor. A light source, a scale that moves relative to the light source and has a periodic optical pattern, and a change in intensity pattern of a light beam emitted from the light source and reflected and modulated by the scale. An optical encoder having a photodetector 3 capable of detecting light, wherein the photodetector 3 and the recess 110 are formed on the semiconductor substrate 5, and the light source 1 is disposed in the recess 110 on the semiconductor substrate 5, Further, the slit 100 is disposed on the concave portion 110, and the light beam emitted from the light source 1 irradiates the scale 2 after passing through the slit 100. [Selection] Figure 1 |