http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005037887-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2004-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a80a742a166bc52b7b2320a7dc979cb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de9c993ed66f82baae6aa97500ecf35e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b371d878503af0da2b50566aef90ca7d |
| publicationDate | 2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005037887-A |
| titleOfInvention | Positive resist composition and resist pattern forming method using the same |
| abstract | PROBLEM TO BE SOLVED: To provide a positive resist composition excellent in lithography properties such as resolution, resist pattern shape, depth of focus width and the like. A positive resist composition comprising a resin component (A) whose alkali solubility is increased by the action of an acid, an acid generator component (B) that generates acid upon exposure, and an organic solvent (C). The component (B) is represented by the following general formula (I) [wherein R 1 and R 2 are each independently an alkyl group having 1 to 10 carbon atoms, or R 1 and R 2 are bonded, R 1 , R 2 and an alkylene group capable of forming a 6-9 membered ring by a sulfur atom between R 1 and R 2 ; each R 3 is independently an alkyl group having 1 to 5 carbon atoms, M may represent the integer of 2 to 5; X − is an anion capable of forming a sulfonium salt]. Resist composition. [Chemical 1] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2020616-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084183-B2 |
| priorityDate | 2003-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 100.