http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005026455-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2003-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caa44e16ee81b9ec580a8325ace6080b |
| publicationDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005026455-A |
| titleOfInvention | Processing method and processing apparatus |
| abstract | The present invention makes it possible to keep the flow rates of a plurality of raw materials constant while maintaining the mixing ratio at a predetermined value, and the flow rate fluctuation at the minimum control flow rate of the flow rate controller greatly affects the composition of the product. It is an object of the present invention to provide a processing method and a processing apparatus that do not give a problem. Each of a plurality of materials (Pb, Zr, Ti) is dissolved in a solvent to prepare a plurality of liquid materials having predetermined different concentrations. A plurality of liquid materials are supplied to the vaporizers 40, 46, and 52 at substantially equal flow rates. Each of the plurality of liquid materials is mixed at a mixing ratio so that the amount of substances of the plurality of materials supplied to the processing chamber 22 per unit time becomes a predetermined ratio required for processing by being supplied at an equal flow rate. Is done. The vaporized material is supplied to the processing chamber 22 via the shower head 24 to generate a PZT film. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009076881-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011192962-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009028619-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009129966-A |
| priorityDate | 2003-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.