http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005025019-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122 |
| filingDate | 2003-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25602ddb5505903ea004b498f7c51d71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfcf45acbff5b625c5c33750e8cf73c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bfd7d06f811a540282902d3828c50d0 |
| publicationDate | 2005-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005025019-A |
| titleOfInvention | Manufacturing method of optical path conversion element |
| abstract | The present invention provides a method for manufacturing an optical path conversion element, in which the surface of an inclined surface is smooth, optical loss that occurs during optical path conversion can be reduced, and furthermore, the optical path conversion element can be manufactured at low cost. A precursor solution 2 containing a photosensitive polyimide resin precursor is coated on a substrate 1, and then the precursor solution 2 is pre-dried to form a resin layer 3 made of a photosensitive polyimide resin precursor. Form. Thereafter, the resin layer 3 is exposed through a photomask 4 having a slit having a predetermined width, heated after the exposure, and then the resin layer 3 is developed to form a mirror precursor 6. Thereafter, the mirror precursor 6 is cured to form a mirror 7 having a substantially inclined surface 5 of 45 °. Then, if necessary, an optical waveguide 10 made of a resin that covers the mirror 7 is formed. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009069668-A |
| priorityDate | 2003-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.