| abstract |
A contact characteristic for inspecting a narrow-pitch semiconductor element is stable, and it is difficult to manufacture an inspection apparatus with good assemblability. The present invention provides a first contact terminal that is in electrical contact with an electrode of an inspection object formed at a narrow pitch, a wiring routed from the first contact terminal, and the wiring and electrical connection. A probe card using a probe sheet using a probe sheet lined with a metal sheet, and a contact card formed using an etching hole of a crystalline member, and using the probe card This is a semiconductor device inspection method (manufacturing method). [Selection] Figure 2 |