| abstract |
PROBLEM TO BE SOLVED: To provide a composition capable of easily forming a silane polymer having a higher molecular weight, particularly a good quality silicon film, from the viewpoint of wettability, boiling point and safety when applied to a substrate. A composition for forming a silicon film containing a silane polymer obtained by irradiating a photopolymerizable silane compound with light in a specific wavelength region and photopolymerizing the composition, and applying the composition to a substrate. And a method of forming a silicon film, in which heat treatment and / or light treatment are performed. [Selection figure] None |