http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005018087-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2004-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b150769596bad1eb8c44091069f9392b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5025a2c4e83e8edabbb7c1c0d9f27b81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8299e5d23e6728a39d8a6cf557471f68 |
| publicationDate | 2005-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005018087-A |
| titleOfInvention | Radiation sensitive resin composition |
| abstract | Disclosed is a radiation-sensitive resin composition that is particularly excellent in contact hole resolution as a chemically amplified resist, and is excellent in radiation transparency, dry etching resistance, pattern shape, sensitivity, resolution, and the like. A radiation-sensitive resin composition includes (A) a resin having an alicyclic skeleton only in the main chain, (B) a compound having a molecular weight of 1,000 or less represented by the following general formula (1), and ( C) A radiation-sensitive acid generator is contained, and at least one of component (A) and component (B) contains an acid-cleavable group. [Chemical 1] [Wherein, R 1 and R 2 represent a hydrogen atom or an acid-cleavable group, Z represents a group having a cyclic hydrocarbon structure with a total number of ring carbon atoms of 7 to 25, a represents an integer of 0 to 6, b is an integer of 1-6. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008287065-A |
| priorityDate | 2004-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 408.