http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005004159-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2003-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1826cb53e8e5226054260a30aabfebb1 |
| publicationDate | 2005-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005004159-A |
| titleOfInvention | Positive resist composition and pattern forming method using the same |
| abstract | PROBLEM TO BE SOLVED: To provide a positive resist composition suitable for use with an exposure light source of 200 nm or less, particularly F 2 excimer laser light (157 nm), specifically exhibiting sufficient transparency when using a light source of 157 nm. A positive resist composition having a high limit resolving power and reduced scum and development defects is provided. (A) a resin that decomposes by the action of an acid to generate an alkali-soluble group and decomposes by an action of an acid containing at least one kind to increase the solubility in an alkali developer; and (B) an actinic ray Or a composition containing a compound that generates an acid by the action of radiation, wherein at least one of the groups that are decomposed by the action of the acid of the resin (A) to generate an alkali-soluble group is decomposed by the action of the acid A positive resist composition comprising a specific group containing a fluorine atom in a group that is eliminated when a soluble group is formed. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781157-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8124327-B2 |
| priorityDate | 2003-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 207.