Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbffa3b81b3b862dc7220b5648f5f745 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2202-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D01F9-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-745 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D01F9-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00 |
filingDate |
2004-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_990c722f2c21313b672ac72c4eb053f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2e780759f178c515f7abcfc7f6e6803 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13db2288279536c7c51b8ebfb85d05ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db4cf5ddace4585d143ea1e3bc5eec7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88540f2cdffe2a322ab1ca430526bee9 |
publicationDate |
2005-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2005001105-A |
titleOfInvention |
Fabrication method of nano-pattern and carbon nanotube-bio-nanoarray using organic supramolecular self-assembly and UV etching |
abstract |
PROBLEM TO BE SOLVED: To provide a method for forming an organic supramolecular pattern of several nanometers or less using self-assembly of organic supramolecules and UV etching. (A) a step of forming an organic supramolecular thin film on a substrate; (b) a step of self-assembling the organic supramolecules by annealing to form a regular structure; and (c) the organic supramolecule. A nanometer or less including a step of forming a hole-shaped organic supramolecular nanopattern by irradiating UV to a regular structure formed by molecular self-assembly and decomposing a central portion where carbon chains are gathered. A method of forming a size pattern is provided. [Selection] Figure 3 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017536351-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2012121-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005040938-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012011374-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007196368-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100827362-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10517995-B2 |
priorityDate |
2003-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |