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filingDate 2004-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_990c722f2c21313b672ac72c4eb053f8
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publicationDate 2005-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005001105-A
titleOfInvention Fabrication method of nano-pattern and carbon nanotube-bio-nanoarray using organic supramolecular self-assembly and UV etching
abstract PROBLEM TO BE SOLVED: To provide a method for forming an organic supramolecular pattern of several nanometers or less using self-assembly of organic supramolecules and UV etching. (A) a step of forming an organic supramolecular thin film on a substrate; (b) a step of self-assembling the organic supramolecules by annealing to form a regular structure; and (c) the organic supramolecule. A nanometer or less including a step of forming a hole-shaped organic supramolecular nanopattern by irradiating UV to a regular structure formed by molecular self-assembly and decomposing a central portion where carbon chains are gathered. A method of forming a size pattern is provided. [Selection] Figure 3
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