http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004533633-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2001-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004533633-A |
| titleOfInvention | Semiconductor developer |
| abstract | Useful developer solutions in processing semiconductor-based circuit elements and their precursors containing tris- (2-hydroxyethyl) methyl ammonium hydroxide are provided herein. The developer according to the invention is preferably an aqueous or alcoholic solution of tris- (2-hydroxyethyl) methylammonium hydroxide further comprising a stabilizer. The use of the compositions provided herein releases significantly reduced levels of volatile amines during the development process, which reduces the burden on clean room atmosphere purification equipment due to reduced airborne impurities. |
| priorityDate | 2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.