http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004505433-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-398 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B15-02 |
| filingDate | 2000-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004505433-A |
| titleOfInvention | System and method for product yield prediction |
| abstract | Systems and methods for predicting integrated circuit yield include at least one type of characterization vehicle that incorporates at least one feature representing at least one type of feature to be incorporated into a final integrated circuit product. The characterization vehicle undergoes at least one of the process operations that make up the manufacturing cycle to be used in manufacturing the integrated circuit product to generate a yield model. This yield model implements the layout defined by the characterization vehicle and preferably includes features that facilitate the collection of electrical test data at operating speed and testing of prototype sections. The extraction engine extracts predetermined layout attributes from the proposed product layout. Operating on a yield model, the extraction engine generates yield predictions in response to layout attributes and step-by-step destruction of layers or manufacturing processes. These yield predictions are then used to determine which areas in the manufacturing process need to be improved most. |
| priorityDate | 1999-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09306837-A |
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578708 |
Total number of triples: 20.