| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M3-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M3-20 |
| filingDate |
2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004502935-A |
| titleOfInvention |
Sensor for helium or hydrogen |
| abstract |
The present invention relates to a sensor (1) for helium or hydrogen, comprising a vacuum-tight casing (2) and a selectively acting channel (9) for the gas to be measured. The present invention relates to a type in which a cold cathode unit (3, 4) consuming gas is provided in (2). In order to improve the characteristics of such a sensor, the casing (2) is made of glass and the components of the gas passage (9) are made of silicon material and have the desired selective characteristics. (18) A gas holding the membrane (18) and having a silicon disk (19) and a heater (24) provided with a large number of through holes (21) and selectively acting on the casing (2). An arrangement is proposed in which the passages (9) are connected to one another without a polymer and without an elastomer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007086069-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017062119-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008541076-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011514523-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009540268-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008525770-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9632067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4806011-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013536937-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9360465-B2 |
| priorityDate |
2000-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |