| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-38 |
| filingDate |
2001-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004502301-A |
| titleOfInvention |
Formation of boride barrier layer using chemisorption technique |
| abstract |
A method is provided for forming a boride layer for the manufacture of an integrated circuit. In one embodiment, a boride layer is formed by chemisorbing a single layer of a boron-containing compound (305) and a single layer of a refractory metal compound (307) onto a substrate. In another embodiment, the boride layer has a composite structure. The composite boride layer structure (409) has two or more refractory metals (M1, M2). The composite boride layer is formed by sequentially chemisorbing a single layer of a boron compound (405) and a single layer of two or more refractory metal compounds (407). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012142359-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021522408-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102391969-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170120498-A |
| priorityDate |
2000-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |