| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec7e7c1c7f85f8c9cf7ed4568884528a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf7acbf589babcb2ff8c6de0b45dff9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_275fbc97b66e6cb3eecb076f6ab035cd |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63994dcf2fa4fdfb6a381a9215815dab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22075aab483971da5f92f539b5391bcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_184f226163942b172012249b815611cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2f5ffeb777e5e8ff77db5de5601751 |
| publicationDate |
2004-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004356558-A |
| titleOfInvention |
Coating device and coating method |
| abstract |
Provided are a coating apparatus and a coating method capable of providing a coating film having good film quality. A processing chamber; Substrate holding means for arranging the electronic device substrate at a predetermined position in the processing chamber; coating material supply means for supplying the coating material; and plasma irradiation for the electronic device substrate. A coating apparatus comprising at least a plasma source. With such a configuration, it is possible to form a coating layer on the electronic device substrate while irradiating the substrate on the substrate with the plasma. [Selection diagram] Fig. 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10071387-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7354138-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008181704-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010535624-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013008919-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011108671-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5987150-B2 |
| priorityDate |
2003-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |