http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004356169-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d1d9c59848bff6ad5f55923d1290f5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2003-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bdab01a4a38977f4bcb6d4d3d1048b6 |
| publicationDate | 2004-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004356169-A |
| titleOfInvention | Capacitance value measurement circuit and semiconductor device evaluation method |
| abstract | An object of the present invention is to provide a capacitance value measuring circuit which can measure a subdivided capacitance component using a CBCM method. A measurement target NMOS transistor having a gate electrode electrically connected to a node of a CBCM circuit is formed in a P well region provided in a bottom N well region. Due to the existence of the bottom N well region 7, the NMOS transistor MN1 and the like and the measurement target NMOS transistor MTST (n) are formed separately, and the substrate 22 of the measurement target NMOS transistor MTST (n) is formed by the pad 22 formed in the P well region 8. Can be set independently. [Selection diagram] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014163278-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008198832-A |
| priorityDate | 2003-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415742970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69529 |
Total number of triples: 19.