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filingDate 2003-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2004352568-A
titleOfInvention Thin film material and method of manufacturing the same
abstract An object of the present invention is to provide a method of manufacturing a thin film material and a thin film material capable of directly forming a uniform and defect-free metal oxide thin film or organic / metal oxide composite thin film on a porous substrate. A step of closing at least pores on the surface side of a porous substrate with at least one polymer compound or a step of forming an intermediate thin film on the porous substrate; Forming a metal oxide thin film or an organic / metal oxide composite thin film on the thin film, and removing the polymer compound or the intermediate thin film or the polymer compound or the intermediate thin film and the organic compound in the organic / metal oxide composite thin film And a process. [Selection diagram] FIG.
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