| abstract |
The present invention provides an ultrasonic diagnostic probe device which is free from lead-free and performance variations of an ultrasonic transducer provided in an ultrasonic probe. An ultrasonic transducer is an electrostatic ultrasonic transducer (hereinafter, also referred to as c-MUT 31) 31 and is automatically manufactured by a silicon process. The c-MUT 31 is formed by arranging a plurality of c-MUT cells 31a. The plurality of c-MUT cells 31a,..., 31a are arranged in a plurality of columns and rows at a minute predetermined pitch. The c-MUT cell 31a mainly includes a lower electrode 37d serving as a signal input / output electrode, a silicon membrane 38, and an upper electrode 37u serving as a ground electrode formed on a silicon substrate 35. It is the braking layer of the membrane 38. An access circuit forming section 43 and a wiring electrode 44 are provided on a silicon substrate 35 on which a plurality of c-MUT cells 31a are arranged. [Selection diagram] FIG. |