| abstract |
A supply device such as a cylinder valve, a pressure regulator, a pressure gauge, a mass flow meter, a line valve, and a filter that does not generate particles due to corrosion and does not form a corrosion product or a reaction product in a gas supply path system. By appropriately adopting the gas flow path from the gas cylinder to the manufacturing equipment, it is possible to supply safer and more efficient gas without deteriorating the purity of high-purity ammonia gas, and to manufacture higher-performance semiconductor devices. To provide a high-purity ammonia gas supply system. A high-purity ammonia gas supply device according to the present invention is characterized in that a seal portion and / or a gas contact portion are made of a resin containing no halogen. By configuring a gas flow path for supplying high-purity ammonia gas using such a high-purity ammonia gas supply device, it is possible to supply high-purity ammonia gas to a semiconductor device manufacturing apparatus without deteriorating the gas purity. Can be. [Selection diagram] None |