http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004317754-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe40990744fb70df6c32d8919bdf5497 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B2015-0403 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B59-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 2003-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5719630834f44391710fa4d5bf280a8d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7710d4f30c7f267eb0ff7a60675a7ccc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baac4cfd63714ab3b641e7c34eecfda8 |
| publicationDate | 2004-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004317754-A |
| titleOfInvention | 1,2-Naphthoquinone-2-diazidesulfonic acid ester-based photosensitizer and photoresist composition |
| abstract | A photosensitive agent for a photoresist for manufacturing a semiconductor integrated circuit, a liquid crystal display, an EL display, and the like, particularly, a liquid crystal display, which has both good sensitivity and can be manufactured at a low cost, as well as sensitivity and remaining film ratio. 1,2-naphthoquinone-2-diazide sulfonic acid ester-based photosensitizer and photoresist composition useful as a polymer. A 1,2-naphthoquinone-2-diazidesulfonic acid ester-based photosensitizer represented by the following general formula (I). Embedded image However, in the general formula (I), R 1 , R 2 , R 3 and R 4 each independently represent an alkyl group having 2 to 9 carbon atoms, and D 1 to D 8 each independently represent at least 2 Is a 1,2-naphthoquinone-2-diazidosulfonyl group, at least one of which is an arylsulfonyl group, and the other represents a hydrogen atom. [Selection diagram] None |
| priorityDate | 2003-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 124.