| abstract |
[PROBLEMS] To provide an etching solution composition for silver or a silver alloy excellent in etching accuracy. [PROBLEMS] To contain nitric acid, an oxidizing agent other than nitric acid, and water to improve in-plane uniformity in etching. An etchant composition for silver or a silver alloy is provided. Preferred oxidizing agents are ceric ammonium nitrate, hydrogen peroxide, ammonium persulfate, potassium permanganate, having a standard electrode potential (25 ° C., E 0 ) with respect to a standard hydrogen electrode in an aqueous solution of 1.7 V or more. It is at least one selected from the group consisting of periodic acid. This composition can form a uniform pattern on the substrate surface and does not adversely affect the working environment. [Selection diagram] None |