http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004315822-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_174384bea2b0804155baead27bcb3b3c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47G19-2227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F34-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F214-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F34-02 |
| filingDate | 2004-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c19ff262984d4938f414fc771c10de82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18678d6997d9f70a7260ebbc5135a506 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_067de8a27ecfe2e82163dde05beb7326 |
| publicationDate | 2004-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004315822-A |
| titleOfInvention | Amorphous perfluorinated polymer |
| abstract | The use in microlithography, wherein the fluoropolymer has a transmission at 157 nm and a mechanical property suitable for producing a transparent film at 157 nm, wherein the fluoropolymer is higher than 50%, preferably higher than 55%. To make amorphous perfluorinated polymers available. The perfluorinated polymer has no labile ionic end groups COF, COOH or their amide derivatives, esters or salts, and the polymer has the formula: Embedded image Wherein R ′ F is equal to R F or OR F (where R F is a perfluoroalkyl group having 1 to 5 carbon atoms); X 1 and X 2 are the same or different from each other. , made from cyclic units derived from perfluorodioxoles of F or CF is 3), The polymer optionally comprises units derived from a perfluorinated comonomer optionally containing an oxygen atom, In the polymer, the cyclic unit derived from perfluorodioxol of the formula (IA) is ≧ 95 mol%, Use of an amorphous perfluorinated polymer to produce a transparent film at a wavelength of 157 nm. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006348088-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009530592-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8497623-B2 |
| priorityDate | 2003-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.