abstract |
The following formula (A) is provided. X m R 1 3-m Si -Y-SiR 1 3-m X m (A) (Wherein, R 1 is a monovalent hydrocarbon group having 1 to 6 carbon atoms, Y is a divalent organic group containing at least one fluorine atom, X is a hydrolyzable group, and m is 1, 2 or 3. .) A coating composition for forming a protective film, comprising a disilane compound or a (partially) hydrolyzed product thereof as a main component. According to the coating composition for forming a protective film of the present invention, a cured film having excellent chemical resistance and antireflection properties can be formed. [Selection diagram] None |