| abstract |
An object of the present invention is to provide a halogen-based corrosive gas such as a fluorine-based corrosive gas and a chlorine-based corrosive gas, and a corrosion-resistant material having excellent corrosion resistance to these plasmas. A portion exposed to a halogen-based corrosive gas or its plasma is made of a composite oxide containing aluminum (Al), yttrium (Y), and a rare earth element (RE) other than yttrium. And [Selection diagram] None |