http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004315255-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F11-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G21-16 |
| filingDate | 2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_748d558efd6706a9a84b74a413b30eb4 |
| publicationDate | 2004-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004315255-A |
| titleOfInvention | Manufacturing method of fluoride crystal, fluoride crystal, optical system, and optical lithography apparatus |
| abstract | An object of the present invention is to provide a method of manufacturing a fluoride crystal, which can reduce the amount of impurities mixed during a manufacturing process and can easily manufacture a fluoride crystal having an excellent internal transmittance. A method of manufacturing a fluoride crystal including crystallizing steps (6) and (2) for forming a crystal by melting and solidifying a fluoride together with a scavenger, wherein the fluoride contains fluorine at a temperature lower than the melting point of the fluoride. Fluorine substitution steps 5 and 7 for replacing impurities adsorbed on the surface with fluorine by contacting the gas are performed, and after the fluorine substitution steps 5 and 7, crystallization steps 6 and 2 are continuously performed. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013015301-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008540303-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013015301-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005116305-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006315918-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006315917-A |
| priorityDate | 2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.