abstract |
The present invention provides a novel fluorine-based cyclic compound, a fluorine-based polymerizable monomer, and a fluorine-based polymer compound, and has high transparency in a wide wavelength range from an ultraviolet region to a near-infrared region. Another object of the present invention is to provide a resist material having both high adhesion to a substrate and high film forming property, and a pattern forming method using the same. The fluorine-containing cyclic compound according to the general formula (1) has at least one hexafluorocarbinol group in norbornadiene which may have a substituent. Embedded image In the formula, R1, R2, and R3 represent hydrogen, an alkyl group, fluorine, a fluoroalkyl group, and a hexafluorocarbinol group. The hexafluorocarbinol group contained in the formula may be partially or wholly protected. Examples of the protecting group include a linear, branched or cyclic hydrocarbon group having 1 to 25 carbon atoms or an aromatic hydrocarbon group. A group containing a hydrogen group, which may contain a fluorine atom, an oxygen atom, a nitrogen atom, and a carbonyl bond. [Selection diagram] None |