| abstract |
PROBLEM TO BE SOLVED: To provide an optical waveguide including a core layer 3 serving as a light propagation region, an upper clad layer 4 and a lower clad layer 2 covering the periphery of the core layer 3, and the upper clad layer 4 is formed with shrinkage in volume. , Cracks and peeling in the lower cladding layer 2 and the upper cladding layer 4 are effectively prevented. SOLUTION: In at least a part of a region where the upper cladding layer 4 and the lower cladding layer 2 are in contact with each other, a stress relaxation made of a material having a lower storage elastic modulus than the upper cladding layer 4 is provided between the upper cladding layer 4 and the lower cladding layer 2. It is characterized in that a layer 5 is provided. [Selection diagram] Fig. 1 |