| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02 |
| filingDate |
2003-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_deafb6c7613e8e1061b60fd6d082f518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72b0495e777552ef742b98013cbdb2c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_027e2ccf1876b7e00d9f78756f87e0f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba96a53d694dffda99693c0c5d0a5f4c |
| publicationDate |
2004-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004292642-A |
| titleOfInvention |
Composition for forming porous film, method for producing porous film, porous film, interlayer insulating film, and semiconductor device |
| abstract |
Provided is a coating liquid for forming a porous film, which can easily form a thin film having a arbitrarily controlled thickness by a method used in an ordinary semiconductor process and has excellent dielectric and mechanical properties. . Kind Code: A1 A silane compound represented by a general formula R 1 n Si (OR 2 ) 4-n is replaced with a silicate compound represented by a general formula R 3 m Si (OH) k (OX) 4- km. With a coating solution containing a condensate obtained by hydrolysis and condensation below, it has become possible to produce a porous insulating film having mechanical strength and dielectric properties applicable to a semiconductor production process. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7786022-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010111806-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012251119-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009173760-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105794522-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105830771-A |
| priorityDate |
2003-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |