http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004274010-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_29bb86825f39f04e8ef1ae34949b1a73 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2003-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ccd61af1991901995c9278c684b5b08 |
| publicationDate | 2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004274010-A |
| titleOfInvention | Prober device |
| abstract | A probing test and a burn-in test can be simultaneously and simultaneously performed on a plurality of semiconductor chips formed on one semiconductor wafer. Kind Code: A1 In a prober device in which a vertical probe is brought into contact with a semiconductor chip to be inspected formed on a semiconductor wafer to make an electrical connection with an inspection device, a plurality of vertical probes 11 are regularly arranged. An integrated individual probe assembly 1, a plurality of pillars 6 erected on a support substrate 5 for mounting a plurality of individual probe assemblies 1 in a matrix, and a pedestal 3 positioned by the pillars 6. And an electrical wiring connector having a ribbon-like film structure, which is incorporated in the space c between the pedestals 3 and is electrically connected to the vertical probe 11 of the individual probe assembly 1. Alternatively, it is made of a material having a coefficient of thermal expansion close to that of the semiconductor wafer, and prevents a displacement of the probe with respect to the chip pad during the burn-in test. [Selection diagram] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101334795-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101358999-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7573281-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007093320-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007086044-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011117970-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4745006-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I416142-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7443182-B2 |
| priorityDate | 2003-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.