http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004273991-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df576b744cd75b364ccd4069242e1626 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2003-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5acf47d36b4882f7c5b3d6f50d88775 |
| publicationDate | 2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004273991-A |
| titleOfInvention | Semiconductor manufacturing method |
| abstract | A semiconductor manufacturing method capable of removing a deposit in a minimum time and obtaining a semiconductor device of stable quality is provided. A semiconductor manufacturing method includes forming a film on a plurality of wafers by repeatedly inserting a wafer into a chamber of a CVD processing apparatus and forming a film. A reducing gas is supplied into the chamber, and the inside of the chamber 1 is conditioned by plasma generated by applying high-frequency power. After alternately performing the film formation and the conditioning process a predetermined number of times, a cleaning process of removing the deposits adhered to the inside of the chamber 1 by the predetermined number of the film formation processes by plasma etching is performed. [Selection diagram] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007063841-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013042092-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113403606-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113529057-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009027011-A |
| priorityDate | 2003-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.