| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14 |
| filingDate |
2003-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1adcdf5a44f93370adac07a22ba731a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_027e2ccf1876b7e00d9f78756f87e0f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72b0495e777552ef742b98013cbdb2c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba96a53d694dffda99693c0c5d0a5f4c |
| publicationDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004269694-A |
| titleOfInvention |
Composition for forming porous film, method for producing porous film, porous film, interlayer insulating film, and semiconductor device |
| abstract |
Provided is a composition which is porous, has a low dielectric constant, is flat and uniform, and has a high mechanical strength, and which can form an optimum film as an interlayer insulating film when used for manufacturing a semiconductor device. A quaternary silicon compound selected from the group consisting of a hydrolyzable silane represented by the formula (1), a hydrolyzate thereof and a partial condensate thereof is converted into a quaternary compound represented by the following formula (2). Provided is a film-forming composition comprising a polymer obtained by hydrolysis and condensation in the presence of a trialkyl (hydroxyalkyl) ammonium hydroxide and an organic solvent. R 1 n -Si- (R 2) 4-n (1) R 3 3 N (OH) R 4 OH (2) [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019019320-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7091176-B2 |
| priorityDate |
2003-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |