| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2003-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eebd6d42c6936182a7125ec0864d850
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e4f3e329258a95bfe81832bce612c0f |
| publicationDate |
2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004253610-A |
| titleOfInvention |
Semiconductor device for charge-up damage evaluation and its evaluation method |
| abstract |
A charge-up damage evaluation semiconductor device capable of detecting charge-up damage due to static electricity and a method for evaluating the same are provided. A silicon substrate, a first insulating film formed on the silicon substrate, and a first conductive layer formed on the first insulating film and connected to the silicon substrate. A second insulating film 11 formed on the first conductive layer 6, a second conductive layer 8 formed on the second insulating film 11 to serve as an antenna, and a second conductive layer And a third insulating film 12 formed on the second insulating film 8. [Selection diagram] Fig. 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011192915-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7178126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007114127-A |
| priorityDate |
2003-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |