http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004250727-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4523522a3b29adce7b3ee37e0101b45 |
| publicationDate | 2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004250727-A |
| titleOfInvention | Particle deposited layer forming apparatus and particle deposited layer forming method |
| abstract | An object of the present invention is to provide a particle deposition layer forming apparatus and a particle deposition layer forming method capable of forming a particle deposition layer having a uniform particle size with a relatively small number of steps. A particle deposition layer forming method according to the present invention includes a reaction chamber to which a raw material gas is supplied, a rear chamber provided with an exhaust port, a substrate disposed in the rear chamber, and holding a substrate. A possible holder 3, a plasma generator 5 for generating plasma in the reaction chamber 22, and the plasma so that the generation and extinction of the plasma are alternately and repeatedly switched while holding the substrate 4 in the holder 3. A controller 6 for controlling the operation of the generator 5, generating particles by reacting the source gas, and depositing the particles on the substrate 4 while maintaining the form of the particles. Features. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009199952-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013101936-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013036095-A |
| priorityDate | 2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.