| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2004-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f75a4961987e98983d016f153ebd1df4 |
| publicationDate |
2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004240422-A |
| titleOfInvention |
Radiation-sensitive resin composition |
| abstract |
【Task】 Provided is a radiation-sensitive resin composition having high flattening performance and high sensitivity in the use of a transparent cured resin pattern and having high productivity of a transparent cured resin pattern. [Solution] In a radiation-sensitive resin composition containing a curable alkali-soluble resin (A), a quinonediazide compound (B) and a solvent (C), the solvent (C) contains γ-butyrolactone in an amount of 5 to 60 wt. % Of the radiation-sensitive resin composition. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006301365-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4696761-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4586703-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4640099-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007041182-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4581810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101221468-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006139265-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006139264-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005330481-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007132956-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4655864-B2 |
| priorityDate |
2003-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |