http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004230283-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fbced1201eea122e8eed6ea0b55630b http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_855baeae1b1748630a6ee1f36429f577 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00 |
| filingDate | 2003-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b3f6a8548286f5a71a51370a8cd13d4 |
| publicationDate | 2004-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004230283-A |
| titleOfInvention | Vacuum chamber |
| abstract | An object of the present invention is to provide a novel vacuum chamber that solves the conventional problems such as gas leakage by performing a special coating treatment on the inner surface of the vacuum chamber. A vacuum chamber formed by coating an organic solvent solution of polysilazane on the entire inner wall of a vacuum chamber formed of a metal material and forming a coating layer of a ceramicized silica coating. |
| priorityDate | 2003-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.