| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d231147f38595bbe3114b758cba4a298 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2003-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd37006000973a918035f10717221bb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5176525b98d669ac91da43750374ab82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fe8fc8cf8f6c32ef675726c48940bcc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_080a3aea503b514ebdd8b81949de37f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eed7e824931d93985c23de1bee09060
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8d2a7b494757c6315c99cc1109bafbd |
| publicationDate |
2004-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004228457-A |
| titleOfInvention |
Method for manufacturing semiconductor device and method for oxidizing semiconductor substrate |
| abstract |
A method of manufacturing a semiconductor device having a trench, wherein a method of forming an oxide film thicker and smaller in stress at a corner portion of the trench than at other portions is provided. When oxidizing a trench formed in a semiconductor substrate, the trench is oxidized in an oxygen atmosphere containing dichloroethylene at a predetermined weight%, so that the thickness of a corner portion of the trench is larger than the thickness of other portions. An oxide film can be formed, whereby a semiconductor device with improved dielectric breakdown characteristics can be obtained. [Selection] Fig. 9 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7696569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745303-B2 |
| priorityDate |
2003-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |