| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 |
| filingDate |
2003-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcf4340e8e1ff85fa9d0b70f31ac4cc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99bdff9aa47d25894f4e6e415f25ea71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e101f0deabbdb6fc5ec5b6b6b9a803c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9fe86738e92f44c48d2cf5fa1a39540
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51fa0ce4d4abeeaeb492059877858d89 |
| publicationDate |
2004-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004228243-A |
| titleOfInvention |
Method for forming insulating film and semiconductor device using the same |
| abstract |
An object of the present invention is to form an insulating film having a low dielectric constant and an excellent film strength by using a silica sol-containing coating solution having a composition excellent in storage stability, thereby improving wiring delay of a semiconductor device. The method includes a step of exposing a substrate surface to water or an alcohol before applying the coating liquid to a substrate using a silica sol-containing coating liquid in which the concentrations of water and alcohols are all 1% by weight or less. [Selection diagram] Fig. 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11277106-B2 |
| priorityDate |
2003-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |