http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004226204-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate | 2003-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28996b008d1eaa8e22449cd03447ceb3 |
publicationDate | 2004-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2004226204-A |
titleOfInvention | Probe card and method for manufacturing the same |
abstract | Provided is a probe card capable of reducing contact resistance by preventing an oxide film from adhering to a probe needle. The probe card includes a plurality of probes manufactured by coating a surface of a first conductive material with a second conductive material having a melting point lower than the melting point of the first conductive material. A plurality of probe needles, each of which is in contact with a plurality of bonding pads provided on the semiconductor wafer and electrically connects the semiconductor wafer and the tester; and a conductive pattern is formed to support the plurality of probe needles. An insulating substrate. [Selection diagram] FIG. |
priorityDate | 2003-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104727 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583196 |
Total number of triples: 18.