| abstract |
An internal space having a large volume inside a transparent material and a movable structure in which a movable member is arranged in the internal space are manufactured in a short time by a simple manufacturing process. SOLUTION: It is possible to carry out processing such as modification and processing of a condensing point inside a transparent material by causing multiphoton absorption only at a condensing point that is a condensing position where femtosecond laser light is condensed. Using this phenomenon, resistless processes and maskless processes are possible, simplifying the manufacturing process and shortening the manufacturing time, and improving the irradiation method of femtosecond laser light on transparent materials Reduce production time. [Selection] Figure 2 |