| abstract |
The present invention provides a real-time spectral image analyzer and a method for analyzing two-dimensional position information and wavelength information of a sample simultaneously and in real time as a spectral image. A movable stage on which a sample is placed, a light source for irradiating the surface of the sample with white light, and a region on one line of reflected light generated by reflecting the white light on the surface of the sample. , A monochromatic CCD camera 5 that captures, in one frame, a spectral spectrum obtained from the reflected light by the spectroscope 4 as one-dimensional position information and wavelength information, and a monochromatic CCD camera 5 A computer 6 for storing, analyzing, and image processing one-dimensional position information and wavelength information and operating the movable stage 1 uniaxially for each frame of the monochrome CCD camera 5 is provided. [Selection diagram] Fig. 1 |