http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004212679-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bc9976a81442c6b94ccab8ba654cc28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2002-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b75420be2fdb043750f157f47c08385 |
| publicationDate | 2004-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004212679-A |
| titleOfInvention | Positive photosensitive resin composition and pattern forming method |
| abstract | An object of the present invention is to provide a polyimide-based positive photosensitive resin composition which can be developed with an aqueous alkali solution, has high resolution and is excellent in dimensional control of a pattern, and a method of forming a positive pattern. Kind Code: A1 A polyimide precursor represented by the general formula [I], (B) a compound represented by the general formula [II], (C) a photosensitive agent which generates an acid by actinic rays, and (D) an actinic ray. A positive photosensitive resin composition containing a photosensitizer that generates radicals and a solvent (E), forms a coating film insolubilized in an aqueous alkali solution by the component (A), and is exposed to actinic rays and then heated. This is a pattern forming method in which only the exposed portion of the insolubilized coating film is decomposed, only the exposed and decomposed portion is dissolved in an aqueous alkaline solution, developed into a positive pattern, and then heat-treated for imidization. Embedded image Embedded image [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7687208-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9017925-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2056163-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2056163-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005070763-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9389515-B2 |
| priorityDate | 2002-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 289.