http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004189630-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-93 |
| filingDate | 2002-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4c97dd971e95a6ab2dec9807ce0d535 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1c295e59534a55aea1e8ea08b01bc0d |
| publicationDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004189630-A |
| titleOfInvention | Method for purifying monomer for resist |
| abstract | An object of the present invention is to provide a resist monomer having an extremely small metal content and water content by easily and effectively reducing impurities from a crude monomer for a resist obtained through a reaction using a borohydride salt. . Kind Code: A1 In purifying a crude monomer for a resist obtained through a reaction using a borohydride salt, the crude monomer is washed with an aqueous solution containing amines, and then washed with ion-exchanged water or distilled water. A method for purifying a resist monomer, comprising performing an azeotropic dehydration treatment at a temperature of from 20 to 80 ° C. in the presence of a resist. [Selection diagram] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010275327-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008239492-A |
| priorityDate | 2002-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.