http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004184859-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b150769596bad1eb8c44091069f9392b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_381de81b1f3fad7df1c4007aacaa45f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cb325f92a1858f1c565cbfc944f4a33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07dcb6c7c2d9e3ec810acb3d942b2bdd |
publicationDate | 2004-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2004184859-A |
titleOfInvention | Radiation-sensitive resin composition |
abstract | An object of the present invention is to provide a radiation-sensitive resin composition suitable as a chemically amplified resist excellent in transparency at a wavelength of 193 nm or less, dissolution contrast and resolution. The composition comprises (A) an acid-dissociable group-containing resin which becomes alkali-soluble by the action of an acid, (B) a radiation-sensitive acid generator, and (C) a compound represented by the formula (1) or (2). It contains a compound and / or a polymer having a repeating unit of the formula (3) or (4). Embedded image Embedded image [X represents a hydrogen atom, a trifluoromethyl group, a group of the formula (i), etc .; in the formulas (1) and (2), at least one of X is a group of the formula (i); ~ 2. Embedded image (Rf 1 represents a hydrogen atom, a methyl group, a trifluoromethyl group, Y represents a single bond, a methylene group, a cyclohexylene group, or a phenylene group, Z represents a hydrogen atom, an acid dissociable organic group, and z represents 0 -3, r is 0-1)) [Selection diagram] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006058416-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4524154-B2 |
priorityDate | 2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 636.