| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1dffa57ae641849a5f0c50ea8ab5ea0c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-428 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ba295a8884f5b49839f9c916d2ab2bf |
| publicationDate |
2004-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004176135-A |
| titleOfInvention |
Material for sputtering target and sintered body thereof |
| abstract |
An object of the present invention is to provide a sputtering target material capable of forming a silicon oxide thin film having excellent barrier properties against gas and moisture on the surface of a base material, and a sintered body thereof. Kind Code: A1 A sputtering method used for reactive sputtering comprising 30 to 100% of silicon monoxide and 0 to 70% of silicon dioxide (silicon: 5% or less may be contained therein). Sputtering used for target material or non-reactive sputtering composed of silicon monoxide: 30 to 90% and silicon dioxide: 10 to 70% (similarly, silicon: 5% or less may be contained) A target material, and a silicon oxide sintered body having a sintered density of 95% or more of the theoretical density obtained by pressure-sintering the above material at 1250 ° C. or more. [Selection diagram] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008008948-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010018445-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013047364-A |
| priorityDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |