http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004172545-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2002-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547b9d1e6cecacc1e474ca2fecaf53ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ef8603ad9614a38aad34708d5bac161 |
| publicationDate | 2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004172545-A |
| titleOfInvention | Method for evaluating characteristics of semiconductor device |
| abstract | An object of the present invention is to provide a method for evaluating characteristics of a semiconductor device which can be further reduced in size. A characteristic evaluation method for a semiconductor device according to the present invention includes a step ST11 of arbitrarily setting an evaluation element from among TEG evaluation candidate elements (MISFETs) and arbitrarily setting a drain voltage Vd0 ; A step ST12 of obtaining a parasitic resistance R sd generated in the drain region and evaluating the deterioration of the drain current from the value of the parasitic resistance R sd ; a step ST13 of obtaining a magnitude of a horizontal electric field E // in the channel region; From the evaluation results of step ST13 and step ST13, it is determined whether or not the selected evaluation element is suitable for the evaluation of the effective mobility. If the two determination conditions in step ST14 are not satisfied, the condition is determined. When the two determination conditions in step ST16 to be changed and step ST14 are satisfied And a step ST15 of evaluating the effective mobility. [Selection diagram] Fig. 1 |
| priorityDate | 2002-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419581494 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5281951 |
Total number of triples: 15.