http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004170263-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2002-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f23c91f4ed1ed5e4da5ecff89dce870 |
| publicationDate | 2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2004170263-A |
| titleOfInvention | Probe card cleaning tool and cleaning method for probe card |
| abstract | An object of the present invention is to provide a cleaning tool and a cleaning method which can prevent insufficient cleaning and excessive cleaning of a stylus of a probe card and can perform cleaning of a stylus in a short time. A cleaning tool (5) for cleaning a stylus (4a) of a probe card (4) in a prober itself or a polishing surface (5a) thereof is formed of a conductive polishing material, for example, tungsten carbide. Therefore, by using the cleaning tool 5, the cleaning operation of the stylus and the contact check operation of checking the electrical continuity of the stylus can be performed in parallel. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102928761-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015170627-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100797318-B1 |
| priorityDate | 2002-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526597 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724274 |
Total number of triples: 17.